Educational guide School of Chemical Engineering |
english |
Nanoscience and Nanotechnology (2010) |
Subjects |
NANOFABRICATION AND NANOPROCESSING |
Contents |
IDENTIFYING DATA | 2012_13 |
Subject | NANOFABRICATION AND NANOPROCESSING | Code | 20635261 | |||||
Study programme |
|
Cycle | 2nd | |||||
Descriptors | Credits | Type | Year | Period | ||||
5 | Optional | Only annual |
Competences | Learning aims | Contents |
Planning | Methodologies | Personalized attention |
Assessment | Sources of information | Recommendations |
Topic | Sub-topic |
Chapter 0. | Introduction and preliminary concepts. |
Chapter 1. Visible and ultraviolet lithography. | Concept of optical lithography. Conventional optical lithography. Resists. Equipment. Microelectronics as driving force for miniaturization. Limits of optical lithography. Advanced optical lithography. |
Chapter 2. Electron-beam lithography. |
Introduction to Electron Beam Lithography. Electron Optics: EBL Systems. Electron-Solid Interactions. Exposure: Resists. Proximity effects. Process Technology. Applications. |
Chapter 3. Nanofabrication with polymers. | Polymer availability for top-down lithography. Bottom-up lithography with polymers. Block-copolymers. Fabrication of polymer nanostructures. |
Chapter 4. Focused ion-beam technology. |
Polymer availability for top-down lithography. Bottom-up lithography with polymers. Block-copolymers. Fabrication of polymer nanostructures. |
Chapter 5. Non-conventional lithographic techniques. | Lithographies based on near field microscopies: Introduction to Scanning Probe Microscopy. Summary of Scanning Probe Lithography Methods. Atomic manipulation (STM). Manipulation of objects and molecules. Indentation/Local deposition. Local oxidation nanolithography. Local dispensing of liquids and molecules (including Dip Pen nanolithography). Parallel nanofabrication. Interference or holographic lithography. Embossing lithographies: Hot embossing and nanoimprinting. Soft lithographies. |
Chapter 6. Non-lithographic nanofabrication methods. | Fabrication of nanotemplates. Growth inside the templates. Self-assembling of molecules and crystals. Synthesis of nanotubes, nanowires, nanobelts and nanoparticles. |
Chapter 7. Growth and deposition techniques. |
Process of growth. Evaporation. Molecular beam epitaxy. Sputtering. Ion-assited deposition. Laser ablation. Chemical phase deposition. Plasma-assisted deposition. Langmuir-Blodgett deposition method. |
Chapter 8. Processing of layers. | Wet and dry chemical etching. Lift-off processes. Plasma assisted and reactive etching. Ionic etching. |
Chapter 9. | Examples. |