Guia docent 2013_14 Escola Tècnica Superior d'Enginyeria Química

Fonts d'informació

Bàsica	M.J. Madou , Fundamentals of microfabrication: the science of miniaturization. , CRC Press , 2002 B. Bushan et al. , Springer Handbook of Nanotechnology , Springer, 2006 J.N. Helbert, Handbook of VLSI Microlithography - Principles, Tools, Technology and Applications. , William Andrew Publishing/Noyes , 2001 H.S. Nalwa (editor) , Encyclopedia of nanoscience and nanotechnology , American Scientific Publishers , 2004 Z. Cui , Micro-Nanofabrication: Technology and Applications , Springer Verlag , 2006 M. Ohring , Materials Science of Thin Films , Academic Press , 2002 J.A. Venables , Introduction to Surface and Thin Film Processes , Cambridge University Press , 2001

Complementària
	Journals in the field of Nanotechnology Applied Physics and Chemical Synthesis Proceedings of conferences in the field of the subject