2017_18
University
Rovira y Virgili
Educational guide 
School of Chemical Engineering
A A 
english 
Nanoscience, Materials and Processes: Chemical Technology at the Frontier
 Subjects
  NANOFABRICATION AND NANOPROCESSING
   Sources of information
Basic M.J. Madou , Fundamentals of microfabrication: the science of miniaturization. , CRC Press , 2002
B. Bushan et al. , Springer Handbook of Nanotechnology , Springer, 2006
J.N. Helbert, Handbook of VLSI Microlithography - Principles, Tools, Technology and Applications. , William Andrew Publishing/Noyes , 2001
H.S. Nalwa (editor) , Encyclopedia of nanoscience and nanotechnology , American Scientific Publishers , 2004
Z. Cui , Micro-Nanofabrication: Technology and Applications , Springer Verlag , 2006
M. Ohring , Materials Science of Thin Films , Academic Press , 2002
J.A. Venables , Introduction to Surface and Thin Film Processes , Cambridge University Press , 2001

Complementary

Journals in the field of Nanotechnology

Applied Physics and Chemical Synthesis

Proceedings of conferences in the field of the subject