2014_15
Universitat
Rovira i Virgili
Guia docent 
Escola Tècnica Superior d'Enginyeria Química
A A 
català 
Nanociència, Materials i Processos: Tecnologia Química de Frontera (2013)
 Assignatures
  NANOFABRICACIÓ I NANOPROCESSAT
   Fonts d'informació
Bàsica M.J. Madou , Fundamentals of microfabrication: the science of miniaturization. , CRC Press , 2002
B. Bushan et al. , Springer Handbook of Nanotechnology , Springer, 2006
J.N. Helbert, Handbook of VLSI Microlithography - Principles, Tools, Technology and Applications. , William Andrew Publishing/Noyes , 2001
H.S. Nalwa (editor) , Encyclopedia of nanoscience and nanotechnology , American Scientific Publishers , 2004
Z. Cui , Micro-Nanofabrication: Technology and Applications , Springer Verlag , 2006
M. Ohring , Materials Science of Thin Films , Academic Press , 2002
J.A. Venables , Introduction to Surface and Thin Film Processes , Cambridge University Press , 2001

Complementària

Journals in the field of Nanotechnology

Applied Physics and Chemical Synthesis

Proceedings of conferences in the field of the subject